| 摘要 |
PURPOSE: To control independently an applied voltage and uniformalize a film thickness distribution and film quality of a thin film formed on one face of a substrate by a method wherein a first electrode each end face of which airtightly comes into contact with the substrate to form a film formation space and a second electrode facing to each other across the substrate are provided with respect to flexible substrates of two columns carried in parallel. CONSTITUTION: A high voltage electrode 21 is provided between flexible substrates 1 of two columns carried in parallel and grounding electrodes 22 are respectively arranged on the outside of each of the substrates 1 facing the high voltage electrode 21. The high voltage electrodes 21 are coupled to each other via a discharge block 9 composed of an insulator on the back face part, and further the end face is closely adhered to the substrate 1 via a seal block 8 to form a film formation chamber 5 capable of holding an airtightness. Thus, thin films of excellent quality can be formed on the flexible substrates 1, and it is possible to prevent a manufacturing apparatus of a thin film photoelectric conversion element from becoming larger in scale. |
