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发明名称
SUBSTRATE PROCESSING APPARATUS
摘要
申请公布号
KR960015928(B1)
申请公布日期
1996.11.23
申请号
KR19930011753
申请日期
1993.06.25
申请人
DAINIPPON SCREEN MFG.KK.
发明人
MURAOKA, YUSUKE;YONEMURA, JUNICHI;ARAKI, HIROYUKI;UCHIYAMA, SHIGEYA;TANAKA, KATSUNORI
分类号
H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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