| 摘要 |
PROBLEM TO BE SOLVED: To provide a response analysis method and device using optical pumping, capable of detecting charge carrier wave having high excitation output and short charge carrier life with sufficiently high precision for detecting a radioactive channel and non-reductive channel of charge carrier recouping, using optical pumping of semiconductor, and to enable individual evaluation of each channel. SOLUTION: The intensity of exciting laser beams is modulated by two non-continuous modulation frequencies Ω1, Ω2, so as to measure the luminescent beams emitted from an objective 4 with respect to the difference frequency Ω-Ω2 for analyzing the luminescent beams as a function of arithmetical mean of the modulation frequencies Ω1, Ω2. In such a constitution, a method and device are utilized in the semiconductor industry for determining different electrical parameters of semiconductor materials. |
