| 摘要 |
PURPOSE:To provide a vessel having a long service life in high-temp. use by coating an Mo-base metal with a Pt-base metal in which oxides are dispersed. CONSTITUTION:This clad vessel is constituted by coating Mo or Mo-base alloy with Pt or Pt alloy in which oxides are dispersed. Since this vessel has superior oxidation resistance, and further, oxides are dispersed in a coating film and grain growth at high temp. is inhibited, the service life of this vessel can be prolonged. Moreover, Al2O3, ZrO2, Y2O3, etc., are cited as the above oxides, and it is preferable to regulate the amount of oxides to about 0.02-10vol.%. The above clad vessel can be manufactured by simultaneously using two targets of Pt and Y2O3 and executing binary simultaneous sputtering of the above two targets onto the inner wall of a crucible made of Mo. |
