| 摘要 |
PROBLEM TO BE SOLVED: To raise the reliability on a fuse link, and accelerate the repeating cutting by laser, by accelerating the etching action improved for forming a vertical sidewall for a fuse link. SOLUTION: In a fuse bank for an integrated circuit, the fuse bank is composed of the arrays 21, 22, and 23 of fuse links and dummy structure of arrays 24, 25, and 26 being put between close to the fuse links so as to accelerate the formation of vertical sidewalls and fixed height of the fuse links, whereby the fuse links can be cut with reliability and reproducibility by laser. |
