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发明名称
PECVD APPARATUS
摘要
申请公布号
KR970001341(Y1)
申请公布日期
1997.02.22
申请号
KR19930030457U
申请日期
1993.12.29
申请人
HYUNDAI ELECTRONICS IND.CO.,LTD.
发明人
KIM, RAE-SUNG;KANG, MYUNG-KOO;KANG, JOONG-KOO;KIM, NAM-JOON;CHO, KYU-SUK;YU, SOON-JAE
分类号
H01L21/31;(IPC1-7):H01L21/31
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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