| 摘要 |
PROBLEM TO BE SOLVED: To control the position a sample stage in the Z-axial direction regardless of the quantity of the reflected light from an analyzing point in an electron beam microanalyzer. SOLUTION: In the electron beam microanalyzer for analyzing a sample S by emitting an electron beam to the sample S, this device has a sample stage 1 the position of which can be three-dimenslonally controlled; a light emitting mean 8 for emitting a light to the analyzing point of the sample S; and control means 3, 7 for detecting the light signal in the analyzing point to control the X-axial position of the sample stage 1 according to the light signal and also controlling the emitting quantity of the light emitting means 8 so that the quantity of light of the light signal is within a prescribed range. The positioning of the analyzing point to the emitting position of electron beam is performed by the X-axial and Y-axial movements of the sample stage 1, and the control of the focal position in the analyzing point is performed by the Z-axial position control of the sample stage 1 according to the light signal. The light emitting quantity of the light emitting means 8 is controlled by the control means 7 so that the light signal in the analyzing point is within a prescribed range. |
