METHOD AND APPARATUS FOR PATTERN TRANSFER BY CHARGED PARTICLE BEAM,申请号JP19960144404-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR PATTERN TRANSFER BY CHARGED PARTICLE BEAM
摘要
申请公布号	JPH0974064(A)	申请公布日期	1997.03.18
申请号	JP19960144404	申请日期	1996.06.06
申请人	NIKON CORP	发明人	OKINO TERUAKI
分类号	H01L21/027;H01J37/317	主分类号	H01L21/027
代理机构		代理人
主权项
地址

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