| 摘要 |
PROBLEM TO BE SOLVED: To obtain an angular speed sensor having characteristics for detecting an angular speed signal accurately. SOLUTION: The angular speed sensor has a fork arm structure where first and second U-shaped piezoelectrics 4, 5 laminated through a detection electrode 6 are polarized in the laminating direction of at least one fork arm 4a, 5a thereof and drive signals are fed, with reverse phases, between drive electrodes 7, 12 and 8, 11 disposed on the diagonal of fork arm. Since the drive signals are canceled in the vicinity of detection electrodes, the signal detected by the detection electrode 6 is never mixed with drive signal and the angular speed signal detection power is enhanced. |
