| 摘要 |
PROBLEM TO BE SOLVED: To stably form outside and inside electrodes having necessary thickness by using different plating solns. under different conditions. SOLUTION: At first, the part where an outside electrode 21 is formed of a solid electrolyte 20 is immersed in a first chemical plating soln. and the outside electrode 21 is formed in such a state that the inside surface 202 of the solid electrolyte 20 is cut off from the first chemical plating soln. Next, an injection needle is inserted in an inner chamber 25 to inject a second chemical plating soln. into the inner chamber 25 and, after the needle is drawn out of the inner chamber 25, an inside electrode 22 is formed by the second chemical plating soln. and, thereafter, the residual chemical plating soln. is discharged out of the inner chamber 25. By successively repeating the injection process, the plating process and the discharge process several times, the inside electrode 22 having necessary thickness is formed. By simultaneously performing the forming processes of the outside and inside electrodes 21, 22 in parallel, the production efficiency of an element can be enhanced. |
