| 摘要 |
PROBLEM TO BE SOLVED: To form semiconductor thin films such as of photovoltaic element, over a large are, which have a high photoelectric conversion efficiency, high quality, a superior uniformity, a higher reproducibility, and a little defect, in large quantities on a stripped member which continuously moves. SOLUTION: In a process of winding semiconductor thin films after these thin films are laminated in order on a stripped member 1002, the lamination of the semiconductor thin films on the member 1002 is performed so that the physical contact of the member 1002 with a steering roller 1005 is not generated. Or/and in a process of sending out the member 1002 from a bobbin before the semiconductor thin films are laminated in order on the member 1002, the sending-out of the member 1002 is performed so that the physical contact of the member 1002 with the roller 1005 is not generated. The member 1002 is continuously moved in the longitudinal direction, is made to pass through a plurality of film-forming chambers connected with each other through a gasket 1008, the thin films are laminated in order on the member 1002 in the chambers and the thin films are continuously formed. |
