| 摘要 |
PROBLEM TO BE SOLVED: To make controllable the shape of a face to be irradiated and irradiation strength by taking in an image on a work surface through an image pickup optical system and inputting its modulated image in a mask with a variable shape. SOLUTION: A laser beam emitted from a laser generator 10 is expanded by a beam expander 12 and, after collimated by a collimator lens 16, reaches the surface of a work 22 by means of an irradiation optical system 32. A laser beam transmitted through a mask 18 with a variable shape installed in the irradiation optical system 32 is converged on the surface of the work 22 by a condensing lens 20, so that laser machining is performed in accordance with the shape of the mask 18. The image on the surface of the work 22 taken in a TV camera 26 is arithmetically processed by a controller 28, and then inputted in the mask 18 as a modulated image. Thus, the shape of the mask 18 is changed, with a light shielding part adjusted, controlling a laser machining shape on the surface of the work 22. |
