| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and a method to analyze the surface of a sample by the technology of electron energy spectroscopy and a secondary ion flying time mass spectrometry. SOLUTION: This apparatus is a practically an electron energy analyzer 14 having typical hemispherical electrodes 46, 67 to be used for electron energy spectroscopy. Or, the apparatus is a flying time mass spectrometer for which the same energy analyzer is used as an ion analyzer in combination with a linear drift region for the technology of secondary ion flying mass spectrometry and of which a primary ion beam gum 8 has at least a first order time focusing characteristic. In this way, the energy analyzer 14 is used for both technologies, so that the combined apparatus can be provided extremely inexpensively as compared with a conventional combined apparatus consisting of different analyzers for two technologies. |
