发明名称 PERETSUTOBONDEINGUYOPEESUTOTOFUSOCHI
摘要 PURPOSE:To stabilize easily a paste coating state and to contrive the improvement of a yield by a method wherein the title device is provided with a driving unit capable of controlling the moving speed of a discharge nozzle to a substrate and a control unit, which controls the driving unit and controls the moving state of the discharge nozzle. CONSTITUTION:A substrate 31 is conveyed by a lead frame conveying unit, which is not shown in the diagram, is stopped and positioned at a paste coating position and when the positioning completion signal is transferred to a control unit 29, the unit 29 causes a linear servo motor 28 to begin a driving. The unit 29 causes the motor 28 to drive at an operation timing set in advance by a setting unit 30 and controls the driving, a one-cycle operation of one descent, two descents, a stopping and an ascension is performed and a paste is coated on the substrate 31. Thus, by controlling the driving state of the motor 28 by the unit 29, the moving speed of a discharge nozzle 26, the amount of the gap between the nozzle 26 and the substrate 31, the coating time and so on are numerically set according to the viscosity of the paste, the dimension of a pellet and so on and the nozzle 26 can be driven on the optimum coating condition.
申请公布号 JP2631475(B2) 申请公布日期 1997.07.16
申请号 JP19870185513 申请日期 1987.07.27
申请人 TOSHIBA MEKATORONIKUSU KK 发明人 SUZUKI HISAYA
分类号 H01L21/52;(IPC1-7):H01L21/52 主分类号 H01L21/52
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