| 摘要 |
PROBLEM TO BE SOLVED: To make possible applying a board material varying a light quantity to a two-dimensional filter, a two-dimensional optical modulator, a twodimensional optical arithmetic device, etc., of an electromagnetic wave by moving it in the direction varying an overlapping degree with electrostatic force. SOLUTION: This modulator is constituted of a substrate pair consisting of a first substrate 1 and a second substrate 2 parallel arranged with a gap, and light shielding layers 10 are formed on these substrates 1, 2 while remaining plural light passing parts 3. Then, the board material 5 varies the light quantity facing from the second substrate 2 side to the first substrate 1 side or the light quantity facing from the first substrate 1 side to the second substrate 2 side by varying the overlapping degree between respective light passing parts 3 in the direction of respective substrates 1, 2 surface. The board material 5 moves by the electrostatic force by applying a drive voltage between a set of electrodes 7A, 7B formed on at least two among an elastic supporting body 6, the first substrate 1 and the second substrate 2. Thus, the overlapping degree between the board material 5 and the light passing part 3 varies. Thus, it is applied for various devices. |
