| 摘要 |
PROBLEM TO BE SOLVED: To detect a shift in a Y-axis direction, by providing, in a tuning fork having two vibrating parts arranged symmetrically to a Z axis, electrodes formed at both faces for impressing the shift in the Y-axis direction by a Coriolis force and a detecting/driving circuit for impressing a shift detection voltage to a corresponding capacitor. SOLUTION: This gyro apparatus is constituted of two cover members 10A, 10B and a substrate 20 of plate-like members. A tuning fork consists of a pair of tuning fork parts 20-1, 20-2 which are arranged in parallel to an XZ plane and symmetrically to a Z axis. In other words, the Z axis is an axis of the tuning fork. Electrodes 101A-1, 101A-2 are formed at each inner face of the members 10A, 10B. A rectangular shallow recess 10A is formed at each of both faces of the substrate 20 and, the pair of tuning fork parts 20-1, 20-2 are formed at a bottom face of the recess 20A. Vibrating parts 201, 202 shift and vibrate in opposite directions on the XZ plane along an X-axis direction. When an input angular velocityΩaround the Z axis works, a Coriolis force in a Y-axis direction is generated in the vibrating parts 201, 202 whereby the vibrating parts vibrate alternately in the Y-axis direction. A shaft of the vibrating parts can thus be detected.
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