| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent the occurrence of differences in level at the time of etching of light shielding films having a laminated structure and to improve the display grade of a color display device. SOLUTION: The light shielding films 36,... are formed of the three-layered structure composed of the first layers 36a,..., the second layers 36b,... and the third layers 36c,.... All these layers are composed of carbooxide metals. As a result, even if these films are etched after sputtering, the respective layers have proximate etching resistance and, therefore, the differences in level do not arise between the respective layers and the color display device having the high quality and high accuracy is obtd. The refractive indices n1 , n2 , n3 and attenuation coeffts. k1 , k2 k3 of the respective layers are set at adequate values, by which the low-reflectivity performance of the light shielding films 36,... is improved.</p> |
