发明名称 THIN FILM ACTUATED MIRROR ARRAY IN AN OPTICAL PROJECTION SYSTEM AND METHOD FOR MANUFACTURING THE SAME
摘要 <p>Thin film AMA in an optical projection system and a method for manufacturing the same are disclosed. The thin film AMA has a substrate (100) having an electrical wiring and a connecting terminal, a supporting element formed on the substrate (100), an actuator formed on the supporting element, and a reflecting member formed on the actuator. The actuator has a maximum length (L) in order to have a large tilting angle (0), so the reflecting member installed on the actuator has large tilting angle (0). Hence, the light efficiency of the light reflected by reflecting member increases and the contrast of the picture projected onto a screen also increases. As a result, the quality of the picture is enhanced. Furthermore, the distance between a light source and the screen is wider because the actuator has a large tilting angle (0).</p>
申请公布号 WO1998000978(A1) 申请公布日期 1998.01.08
申请号 KR1997000125 申请日期 1997.06.26
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