| 摘要 |
<p>The nozzle of a suface treatment apparatus in which reactive gas is jetted against a substrate to be treated to subject the substrate to a surface treatment comprises a gas introducing section which has a sheet-like gas flow path whose length is sufficiently larger than the width and whose width direction cross section along the flow path is uniform and whose cross section gradually decreases toward the downstream, a throat section which is connected to the gas introducing section and has the minimum cross section in the whole nozzle and a gas jetting section which is connected to the throat section and whose cross section gradually increase at a predetermined widening angle. The gas made to flow through the nozzle is subjected to adiabatic expansion and accelerated to flow at a speed larger than the speed of sound and jetted out in such a way that the jetting plane of the reactive gas forms a long line.</p> |
