| 摘要 |
PROBLEM TO BE SOLVED: To produce an antireflection film having low reflection characteristics with a good productivity at a low cost. SOLUTION: A polarizing functional body 11 as an optical functional material is exposed to an atmosphere of inert gas and oxygen. A single metal selected from silicon, titanium, zirconium and aluminum is vaporized by sputtering while an oxygen partial pressure in the atmosphere is controlled. Then, layers having a high refractive index and layers having a low refractive index comprising the oxide of the single metal are alternately deposited to form a multilayered structure on the surface of the optical functional body. |
