发明名称 |
Method for determining the diameter of a growing monocrystal |
摘要 |
A method and a device is provided for determining the diameter of a monocrystal growing at a crystallization boundary during the pulling of the monocrystal from a melt. The method includes imaging a part of the crystallization boundary on at least one mirror, observing the mirror image and determining the diameter of the monocrystal from the observed relative position of the crystallization boundary on the mirror image.
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申请公布号 |
US5746825(A) |
申请公布日期 |
1998.05.05 |
申请号 |
US19960686118 |
申请日期 |
1996.07.23 |
申请人 |
WACKER SILTRONIC GESELLSCHAFT FUER HALBLEITERMETERIALIEN AG |
发明人 |
VON AMMON, WILFRIED;WEIDNER, HERBERT;THANNER, LUDWIG |
分类号 |
G01B11/08;C30B15/26;C30B29/06;(IPC1-7):C30B15/20 |
主分类号 |
G01B11/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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