发明名称 |
Temperature control system for growing high-purity monocrystals |
摘要 |
A crystal-pulling apparatus incorporates a temperature sensor and an adjustable radiation shield. The temperature sensor measures temperatures of a melt surface adjacent to a solidification interface between a crystal and the melt. The radiation shield regulates radiational cooling of the melt. A control system adjusts the radiation shield in response to changes in the measured temperature of the melt for enhancing dislocation-free growth of the crystal.
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申请公布号 |
US5746828(A) |
申请公布日期 |
1998.05.05 |
申请号 |
US19960587362 |
申请日期 |
1996.01.16 |
申请人 |
GENERAL SIGNAL CORPORATION |
发明人 |
BOULAEV, ANATOLI S. |
分类号 |
C30B15/14;(IPC1-7):C30B35/00 |
主分类号 |
C30B15/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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