发明名称 METHOD OF ESTIMATING SEMICONDUCTOR DEVICE AND ITS ESTIMATION EQUIPMENT
摘要 PROBLEM TO BE SOLVED: To accurately measure the attenuation time contact of time decomposition photoluminescence, by measuring the attenuation constant of photoluminescence, on the basis of photoluminescence obtained by irradiating a semiconductor layer with a pulsed light, while applying a forward bias voltage. SOLUTION: A forward DC voltage is applied to a PN junction through a P side electrode 4 and an N side electrode 5. A light of photoluminescence from a semiconductor layer irradiated with a pulsed light is condensed by lenses 11 of two groups, and enters a streak camera detector 12. The signal obtained by the detector 12 is made to enter a computer 14 for analysis. After the light emission intensity of luminescence by the applied voltage is subtracted, the attenuation time constant of photoluminescence is calculated, on the basis of data light emission intensity of photoluminescence to time.
申请公布号 JPH10135291(A) 申请公布日期 1998.05.22
申请号 JP19960287743 申请日期 1996.10.30
申请人 SHARP CORP 发明人 WATANABE MASANORI;ISHIDA SHINYA
分类号 G01R31/26;H01L21/66;H01L31/10;H01L33/32 主分类号 G01R31/26
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