摘要 |
<p>PROBLEM TO BE SOLVED: To provide a photo-ionization mass spectrometer which enables to improve all detection deficiency. SOLUTION: This device is designed so that a beam combiner 10 whose front side is transparent and whose back side is reflecting may be placed between a laser 6 and a sample 1 on the skew against the laser 6. This device is composed of a reflecting mirror 11 which leads a pulse laser beam 7 transmitted through this beam combiner 10 to the back of the beam combiner 10, an ion gun 2 which rays pulse ion beam 3 on the sample, and a mass spectroscope 9. Either by having the pulses of laser beam transmit at the same point on the sample repeatedly so that ionization efficiency rate is raised by intensifying laser caused by superposing pulses, or by increasing the laser exposure rate by increasing the number of laser exposure, photo-ionization mass spectrometer which enables to improve all detection deficiency can be provided.</p> |