Method and apparatus for measuring the piezoelectric constant of a thin film type piezoelectric material

摘要

Disclosed are method for measuring a piezoelectric constant and an apparatus for performing the same. A piezoelectric material is positioned on a supporting member. A pressing probe is positioned above the material. A pressing member applies a pressure to the material through the pressing probe. A main valve is open. A release valve for changing the pressure is adjusted while the main valve is open. Charge generated from the material is measured by a charge measuring member. The magnitudes of measured charge and applied pressure are recorded in a computing member. The piezoelectric constant of material is calculated from the recorded magnitudes by the computing member. The piezoelectric constant can be measured by using a pneumatic loading method and by applying a uniform force to the whole surface of the material regardless of a topology of the material, without causing a short or a plastic deformation.