| 摘要 |
PROBLEM TO BE SOLVED: To obtain a piping cleaning method and jig capable of safely and easily cleaning exhaust pipings adhered with reaction products, etc., without removing these pipings by depositing and forming thin films of any of org. mater, carbon, aluminum and gold which are removable by liquid chemicals or required gases on the inside walls of the metallic pipings. SOLUTION: The metallic piping 1, for example, made of SUS having a bore of 100mm is prepd. The Al film 2 is formed by a vapor deposition method to 500nm thickness on its inside wall, by which the piping 5 is formed. This piping 5 is used as the exhaust pipe of a semiconductor film-forming apparatus or working apparatus, by which the reaction products 3 are deposited on the Al film 2. Next, the liquid chemical 4, such as 5% dilute hydrochloric acid, capable of dissolving the Al film 2 is injected into the piping 5. At this time, the reaction products 3 which are deposited at a normal temp. are in a porous state and, therefore, the liquid chemical 4 easily penetrate these products. Consequently, the underlying Al film 2 dissolves first in the liquid chemical 4 and, therefore, the reaction products 3 are lifted off and are easily removed. |
