IMPURITY-CONDENSING EQUIPMENT AND IMPURITY-ANALYZING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an impurity-condensing equipment, which can condense the impurities in a sample without dissolving he semiconductor crystal material and to provide an impurity-analyzing method which can analyze the sample, wherein the impurities are condensed, quickly, simply and highly sensitively. SOLUTION: After ions or electrons are emitted on the specified position on a semiconductor crystal sample 11 by an ionizing radiation source 27, the laser light having the specified energy intensity is emitted on the specified position with a laser oscillator 13. Thus, the impurities contained in the semiconductor crystal material 11 is condensed. Then, the impurity condensed semiconductor crystal sample 11 is analyzed with high sensitivity by using the specified physical analyzing means.