ARRAY SUBSTRATE, LIQUID CRYSTAL DISPLAY DEVICE AND PRODUCTION OF THOSE

摘要

PROBLEM TO BE SOLVED: To obtain an array substrate having interlayer insulating films in which cutting in steps of conductive layers in a contact hole part is prevented, by forming a second interlayer insulating layer to have an opening penetrating to the surface of a first conductive layer and forming a second conductive layer to be connected to the first conductive layer through the opening. SOLUTION: An opening 18a is formed by patterning a second interlayer insulating layer 18. The size of the opening 18a is important for the relation of the opening formed in the first interlayer insulating layer 16. Then the substrate is heat treated to cause thermal shrinkage of the second interlayer insulating layer 18. The upper part of the opening widens to form a contact hole (C) having the inner face in a loose slope and a smoothly rounded upper edge. Further, a second conductive layer 20 is deposited. The conductive layer 20 is connected to the first conductive layer 14 through the contact hole (C). Since the contact hole (C) has a rounded edge of the opening and the loose slope of the inner face, no cutting in the steps of layers is caused.