| 摘要 |
PROBLEM TO BE SOLVED: To provide a minute structural body and a method and apparatus for manufacturing the same having the configurational accuracy, in particular, the capability of obtaining a high resolution in its lamination direction, and capable of being formed directly of insulators such as metal or ceramics, and further formed integrally in a fabricated state of a plurality of structural body elements. SOLUTION: A substrate 400 with a plurality of thin films formed having a plurality of cross-sectional configurations respectively for forming a minute structural body is mounted on the substrate holder 301, and by elevating the substrate holder 301, the thin films formed on the substrate 400 are stuck on the surface of a stage 302, thus as the substrate holder 301 is moved downward, the thin films are separated from the substrate 400 and transferred on the stage 302 side. By conducting the transfer iterately, a plurality of thin films are laminated on the stage 302, thereby forming a minute structural body. |
