| 摘要 |
PROBLEM TO BE SOLVED: To reduce costs and power consumption by allowing a frame to have an inner opening for accommodating a beam, detecting the presence of coriolis force that affects the beam and the size, and at the same time driving the beam flexibly. SOLUTION: A sensor 10 consists of a thin beam 12 that is suspended in the inner opening 14 of a frame 16. A side member is aligned to sets 18, 18', 20, and 20', is fixed to both sides of the opening 14 and the bar 12, and at the same time supports the beam 12 inside. It is fixed on the upper and lower surfaces of the narrow electrode beam 12. An equivalent electrode arrangement is fixed to the upper and bottom surfaces of the narrow beam 12, and each electrode consists of a central electrode 22 and edge electrodes 24 and 26 that are arranged symmetrically. The electrode 22 drives the beam 12 at its natural frequency along with a piezoelectric element. The electrodes 24 and 26 are generated due to the coriolis force induction bending or vibration of a horizontal surface, and the coriolis force is induced by an angular velocity regarding an input axis 18 of the sensor 10. |
