| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a completely dried diffraction grating end optical element by a high speed processing by irradiating a polymeric material having a reflection film and processible with laser ablation with a beam of laser from a direction of the reflection film and making a diffraction grating form of the reflection film. SOLUTION: A beam of laser oscillated from a laser device 1 is transmitted by being reflected by a total reflection mirror 2, etc., and is adjusted in the intensity and uniformed to be emitted onto a mask 4. An optical system is comprised of such a mechanism as an intensity distribution of the mask is fixed by a projection lens 5 and a processed piece 6 with a reflection film is fixed on a stage 7 adjustable in the direction of an optical axis, and a pattern is continuously formed by moving the stage 7, if necessary. And, a reflection film is added onto an ablative film. This film with the reflection film is irradiated with laser beam. A part of the irradiated laser beam transmits the reflection film and the polymeric material is irradiated the laser beam. Thus, this polymeric material is ablated and also the reflection film is removed, and a diffraction grating is formed. |
