Silicon force sensor and method of using the same

摘要

The various technologies presented herein relate to a sensor for measurement of high forces and/or high load shock rate(s), whereby the sensor utilizes silicon as the sensing element. A plate of Si can have a thinned region formed therein on which can be formed a number of traces operating as a Wheatstone bridge. The brittle Si can be incorporated into a layered structure comprising ductile and/or compliant materials. The sensor can have a washer-like configuration which can be incorporated into a nut and bolt configuration, whereby tightening of the nut and bolt can facilitate application of a compressive preload upon the sensor. Upon application of an impact load on the bolt, the compressive load on the sensor can be reduced (e.g., moves towards zero-load), however the magnitude of the preload can be such that the load on the sensor does not translate to tensile stress being applied to the sensor.

主权项

1. A method, comprising:
applying a compressive preload to a piezoresistive device, wherein the compressive preload is greater in magnitude than an operating range of operational loads; transmitting an operational load within the operating range to the piezoresistive device so as to produce a reduction in the compressive preload; and measuring the reduction in the compressive preload to facilitate determining a magnitude of the operational load.