Heater device and heat treatment apparatus

摘要

Disclosed is a heater device. The heater device includes: a cylindrical insulating member; a heater element which is spirally wound plural times and disposed on an inner circumference side of the insulating member; and a supporting member having one or more first members disposed on inner circumference side of the heater element and extending in an axial direction of the insulating member, and a plurality of second members which extend from the first members to an outside of the insulating member in a radial direction and pass through gaps between turns of the heater element which are adjacent to each other in the axial direction of the insulating member such that end portions of the second members are formed to be embedded in the insulating member, in which the first members have expansion allowance portions which allow thermal expansion in the axial direction.

主权项

1. A heater device comprising:
a cylindrical insulating member; a heater element which is spirally wound plural times and disposed on an inner circumference side of the insulating member; and a supporting member having one or more first members disposed on inner circumference side of the heater element and extending in an axial direction of the insulating member, and a plurality of second members which extend from the first members to an outside of the insulating member in a radial direction and pass through gaps between turns of the heater element which are adjacent to each other in the axial direction of the insulating member such that end portions of the second members are formed to be embedded in the insulating member, wherein the first members have expansion allowance portions which allow thermal expansion in the axial direction and include gaps interposed between the first members adjacent to each other so as to separate each of the first members in the axial direction of the insulating member.