| 摘要 |
PROBLEM TO BE SOLVED: To provide a rotary angular velocity sensor which has good measuring accuracy because of a structure which is strong against vibrations although being simple and which stably supports a vibrating body. SOLUTION: The support part of a rotary angular velocity sensor which supports a vibrating body 11 comprises a first support beam 20 whereby the vibrating body 11 is supported in such a way as to be capable of vibrating in the transverse direction, a beam support part 21 supporting the first support beam 20, and a second support beam 22 supporting the beam supporting part 21 and enabling the vibrating body 11 to vibrate in a direction perpendicular to the transverse direction, and is thus formed into a less curved simple shape. |
