发明名称 VACUUM SUCTION DEVICE AND ATTRACTION METHOD THEREFOR
摘要 <p>PROBLEM TO BE SOLVED: To provide a vacuum suction device to rapidly output a confirmation signal after suction of an object. SOLUTION: A vacuum pad 2 is arranged at a tip part and vacuum suction is effected by the vacuum pad 2. In a so formed vacuum suction device 1, A rod-form rod 4 to confirm suction of a given object 9 by the vacuum pad 2 is arranged on the central axis 8 of the vacuum suction device 1, and when the rod-form rod 4 sucks the given object 9, a given confirmation signal is outputted.</p>
申请公布号 JP2000000729(A) 申请公布日期 2000.01.07
申请号 JP19980164698 申请日期 1998.06.12
申请人 NEC CORP 发明人 SUGIYAMA YUKINOBU
分类号 B23Q3/08;B21D43/18;H01L21/50;H01L21/677;H01L21/68;(IPC1-7):B23Q3/08 主分类号 B23Q3/08
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