发明名称 METHOD FOR DICING WORK IN DICING EQUIPMENT
摘要 <p>PROBLEM TO BE SOLVED: To provide a method for dicing a work with dicing equipment, in which wasteful diced parts are fully minimized to shorten the time for dicing the work. SOLUTION: In this method, distance between blades 68 and 70 is adjusted so as to correspond to all pitches, and dicing is carried out at first for a street 1-1 with blade 70 and for a street 2-1 with the blade 68, simultaneously. Then, by moving the blade 68 toward blade 70 by one pitch and by moving the blade 70 toward 68 by one pitch, a street 1-2 is diced by the blade 70 and a street 2-2 is diced by blade 68, simultaneously. Dicing with such a method of bringing closer by one pitch is repeated nine times. Then for the remaining eight streets, the distance between blade 68 and blade 70 is shortened by 3 pitches, and streets 1-12 to-15 are diced by the blade 70 and streets 2-12 to-15 are diced by the blade 68, simultaneously.</p>
申请公布号 JP2000003888(A) 申请公布日期 2000.01.07
申请号 JP19990152183 申请日期 1999.05.31
申请人 TOKYO SEIMITSU CO LTD 发明人 OSADA MASATERU;AZUMA MASAYUKI;SHIMODA HIROSHI
分类号 H01L21/301;(IPC1-7):H01L21/301 主分类号 H01L21/301
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