发明名称 Verfahren und Gerät zur Steuerung und Planung von Bearbeitungsmaschinen
摘要 <p>Selected lots and selected process resource are chosen that are available to be processed by the process resource and that are available to process the selected lots respectively. For each of the combination of selected process and selected lots a tool score and a lot score is determine and combined in order to select a winning score. The factory is controlled through the process resource in accordance with the winning score.</p>
申请公布号 DE69513877(D1) 申请公布日期 2000.01.20
申请号 DE1995613877 申请日期 1995.04.28
申请人 TEXAS INSTRUMENTS INC., DALLAS 发明人 KLINE, PAUL J.;MARTIN, CYNTHIA C.;KILGORE, MICHAEL A.
分类号 B23Q41/08;B65G61/00;G05B13/02;G05B15/02;G05B19/02;G05B19/418;G06Q50/00;H01L21/02;H01L21/66;(IPC1-7):G05B19/418 主分类号 B23Q41/08
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