| 摘要 |
PROBLEM TO BE SOLVED: To obtain a metal film having extremely high resolution by a simple method by applying an electroless plating soln. containing a metal ion on a patterned coating layer containing a silyl hydride functional resin on a base body and depositing a patterned metal film on the base body. SOLUTION: This silyl hydride functional resin is preferably a hydrogen silsesquioxane resin and further, a metal ion is derived from a metal salt. The electroless plating soln. contains one or more kinds of substances selected from a group consisting of a solvent of metal salt, a reducing agent, a base, a complexing agent to dissolve the metal salt, a surfactant, and an additive to control the soln. stability and plating rate of the soln. Preferably, a metal seeding soln. containing the metal ion is applied on a coating layer of the silyl hydride functional resin and the seed metal layer is deposited before the electroless plating soln. is applied. Further, the seed metal layer is heated before the electroless plating soln. is applied. |
