发明名称 METAL BASE SEMICONDUCTOR PACKAGE AND RESIN COMPOSITION THEREFOR
摘要 PROBLEM TO BE SOLVED: To prevent a short circuiting between a wire and the wiring inside a wire pad by specifying the depth of a cavity, and protecting a circuit with a solder resist at least on an edge or a slope of the cavity. SOLUTION: A pattern is drawn on a rolled copper foil with an etching resist and subjected to cupric chloride etching to form a copper circuit 100, a soldering land 400, and a bonding pad 500 which is a metal base circuit substrate 001. A photosensitized solder resist(SR) is coated on a conductive circuit by a thickness of 30 μm, and then a pattern is formed to form an SR layer 600. Drawing is performed at a depth of 0.7 mm and a drawing angle of 30 deg., to form a die mounting part 900 (18 mm square).Then a plating layer 700 of Ni plating (3 μm) and Au plating (0.5 μm) is formed in electroless plating. Thus, for the SR layer 600, a circuit is coated as far as the lower part of drawing, and the formation of a short circuiting with the wire due to the exposure of the wiring inside an external pad is prevented.
申请公布号 JP2000077566(A) 申请公布日期 2000.03.14
申请号 JP19980249833 申请日期 1998.09.03
申请人 MITSUI CHEMICALS INC 发明人 MORITA MORIJI;TANAKA HIROBUMI;OOKAWADO ETSUO
分类号 H05K1/05;G03F7/027;H01L23/12 主分类号 H05K1/05
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