发明名称 APPEARANCE IMAGE SORTING DEVICE AND ITS METHOD
摘要 <p>PROBLEM TO BE SOLVED: To make it possible to sort a semiconductor manufacturing state (category) or the like generating a defect of a semiconductor or the like without changing an image feature extraction algorithm even when a process is changed. SOLUTION: A judging part 105 displays an image for judging the manufacturing state of an image display part of a device, a device user instructs the device for a characteristic portion of a defect, a teaching part 106 built in the device automatically extracts the image feature value of the portion instructed by the device user and judges the manufacturing state of the image. The judging part 105 sorts an image acquired thereafter based on the image featured value extracted by the teaching part 106.</p>
申请公布号 JP2000099727(A) 申请公布日期 2000.04.07
申请号 JP19980265451 申请日期 1998.09.18
申请人 HITACHI LTD 发明人 HONDA TOSHIFUMI;TAKAGI YUJI;DOI HIDEAKI
分类号 H01J37/22;G01B11/30;G01N21/88;G01N21/956;G01N23/225;G06T1/00;G06T7/00;H01L21/66;(IPC1-7):G06T7/00 主分类号 H01J37/22
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