| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent a lowering in the accuracy of pattern observation or inspection on the basis of information signals from a target via the irradiation of each charged particle beam, and an electron beam property measurement or the like. SOLUTION: This charged particle beam device has a shielding cylinder fitted to a column support member 8 so as to surround each of detector support members 10i, 10j and 10k, and reflected electron detectors 11i, 11j and 11k laid immediately below each of electron beam columns 1i, 1j and 1k. In this case, the length of the shading cylinder in the optical axis direction is set approximately so that an electron beam irradiation zones on a target in a certain column and the detection plane of reflected electron detector in an adjacent column are not visible to each other.</p> |
