| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a process for efficiently producing a suspension substrate of a magnetic head device by using a base material integrally formed with extraction wiring members and suspensions and removing the flexible resin parts thereof by laser beam processing. SOLUTION: The copper foil 1 on one side of a copper clad laminate 4 formed by successively laminating elastic metal foil 3, a flexible insulating resin layer 2 and the copper foil 1 is subjected to an etching treatment and with the copper foil, as a mask, the flexible insulating resin layer 2 is processed by a Q switch carbon dioxide laser which is a pulse laser beam of <=71 cm2 in energy density of 1 pulse and 500 to 5000 W in pulse peak output and is >=10 kHz in pulse frequency and thereafter, the copper foil 1 is patterned, by which wiring circuits are formed.</p> |
