| 摘要 |
<p>PROBLEM TO BE SOLVED: To carry out highly precise analysis in spite of a low retrieval frequency of a coordinate value and carry out highly precise analysis without any divergence of control even when an extent of a height directional change is greatly increased in an electron prove microanalyzer. SOLUTION: In electron probe microanalyzer 1 carrying out elementary analysis on a sample surface on the basis of a characteristic X-ray emitted from a sample by electron beam radiation, a computing function forming an isoline of a Z-axis coordinate value from a measured coordinate value within an analysis range and finding the range of the Z-axis correction value divided by the isoline is provided, and Z-axis directional position control of the sample is carried out according to the Z-axis correction value so that the sample surface satisfies an analysis condition height. A computing function finding a height correction value on a straight line passing the central position of a height distribution of the sample and using the height correction value for finding a three-dimensional correction value using a center position of the height distribution as a rotation center is provided, and Z-axis directional position control of the sample is carried out on the basis of the Z-axial correction value obtained from the three-dimensional correction value so that the sample surface satisfies the analysis condition height.</p> |
