| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an electron beam apparatus capable of obtaining even information of hydrogen inside a sample. SOLUTION: The intensity signals of hydrogen ions discharged from a sample are stored in a memory 20 corresponding to an analysis position. The intensity data related to the sample surface stored in the memory 20 are sent to an image processing means 21, to be binarized to data of '1' or '0' with this processing means. The image processing means 21 extracts the data represented by '1' and three-dimensional image data are formed from the extracted data. A three-dimensional distribution image is displayed on a display means 22.</p> |
