PRODUCTION OF QUARTZ GLASS JIG PREVENTING SURFACE CONTAMINATION

摘要

PROBLEM TO BE SOLVED: To produce a quartz glass jig at a low cost by reducing surface contamination at the time of anneal-treatment of the quartz glass jig and increasing removal efficiency of the surface contamination by the final cleaning. SOLUTION: An anneal treatment of a quartz glass jig is carried out by dipping the jig in synthetic quartz glass powder to reduce the contamination in an anneal treatment step of a production process of the quartz glass jig. Further, the contamination is reduced by lining the inner wall of an annealing furnace with quartz glass, inserting the quartz glass jig into a quartz glass container, or covering the quartz glass jig with a cover of the quartz glass. The contamination can be also reduced by carrying out the final cleaning of the quartz glass jig with hydrofluoric and nitric acid.