| 摘要 |
<p>A distributed control system comprises an equipment virtual controller which includes a processor configured to store and execute a data collection application, a data query application, a recipe management application, and an alarm management application, wherein the equipment virtual controller is configured to communicate with one or more tools having respective equipment interfaces and communication links. In this way, misprocessing is reduced through a recipe management application which provides secured and version-controlled process recipes. Misprocessing is further reduced through an alarm management application which precisely tracks preventative maintenance schedules. Furthermore, a data collection application used in conjunction with a data query application enhances process performance and assists in tool diagnostics.</p> |
