| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain a method and an apparatus, in which a sample can be analyzed qualitatively and quantitatively with high accuracy and in a short time by a method, wherein the intensity of fluorescent X-rays in a light element region is measured with a wavelength dispersive(WD) X-ray detection means and the intensity of fluorescent X-rays in heavy element region is measured by an energy dispersed(ED) X-ray detection means. SOLUTION: A collimator 14 is moved by a moving mechanism 16. An ED detection means 15 is arranged in the passage of fluorescent X-rays B2. Output pulses from the ED detection means 15 are counted by a signal processing circuit 12 in a comparatively short time. The intensity of fluorescent X-rays B2, mainly in a heavy element region, generated from a sample S is measured. Based on the intensity of the X-rays obtained by this first measurement, the peak of an element to be measured is detected so as to be identified and analyzed by an identification means 25. Then, the collimator 14 is moved. A WD detection means 5 is arranged in the passage of the fluorescent X-rays B2, a scanning mechanism 10 is driven, and a wavelength is scanned continuously. Output pulses from an X-ray detector 9 are counted by the signal processing circuit 12 in a short time. The intensity of fluorescent X-rays B3, generated from the sample S mainly in only a light element region, is measured.</p> |
