WORKING FLUID SUPPLY METHOD AND DEVICE FOR WIRE SAW

摘要

PROBLEM TO BE SOLVED: To stabilize the amount of a working fluid stored in the working fluid tank of a wire saw and improve the accuracy of the temperature control of the working fluid. SOLUTION: A buffer tank 40 is arranged in the collection route of a working fluid collected from the cut part of a work to a working fluid tank 46 and the working fluid supplied to the cut part through the buffer tank 40 is collected to the working fluid tank 46. Meantime, in the controller 88, the number of rotation of a collection pump 66 for collecting the working fluid from the buffer tank 40 to the processing liquid tank 46 is controlled based on the liquid level measured by a liquid level gauge 68 and the number of rotation of the supply pump 52.