| 摘要 |
PROBLEM TO BE SOLVED: To provide a safety door and a device for manufacturing or inspecting a semiconductor provided with the safety door capable of avoiding an swoshing injury or the like of a hand and finger by sandwiching. SOLUTION: A device for manufacturing or inspecting a semiconductor provided with this safety door is provided with a device body 14 for manufacturing of inspecting the semiconductor, an opening part 18 provided on the device body 14, a first door 20 driven along one axial line 28 by a drive device and covering a part of the opening part 18, and a second door 22 urged toward the first door 20 along the axial line 28 and covering a part of the opening part 18. In the case where a hand and finger are sandwiched by an automatic door when the opening part 18 is closed, the second door 22 closing a part of the opening part 18 in only an urged state is moved to the drive direction of the first door 20, since the first door 20 is stopped at a position covering only a part of the opening part 18, only pressure urging the second door does not act on the hand and finger, and a risk for crushing the hand and finger can be avoided. |
