METHOD AND DEVICE FOR WORKING CERAMIC GREEN SHEET

摘要

PROBLEM TO BE SOLVED: To provide a method for working a ceramic green sheet in which through-holes are efficiently formed in the ceramic green sheet having one side supported by a carrier film, without perforating the carrier film. SOLUTION: A laser beam 2 radiated from a laser source 1 is passed through a diffraction grating 3 so as to obtain a spectrum composed of a plurality of laser beams 2a having energy by which a ceramic green sheet 10 is perforated but a carrier film 20 is not perforated. Through-holes are formed in the ceramic green sheet 10 so as not to perforate the carrier film 20 by irradiating the spectrum of the laser beams 2a on the surface of the ceramic green sheet 10 on the side unsupported by the carrier film 20.